Feature

• Integrated or external frequency converter
• Compact design
• Operation in any orientation
• High foreline tolerance
• An oil-free pump for generating clean hig and ultrahigh-vacuum conditions

Advantages to the User

• Space-saver
• Easy to integrate into complex vacuum systems
• Enables the use of down-sized, foreline vacuum pumps
• Low operating costs
• Highly reliable operation

Applications

• Mass spectrometers
• Electron beam microscopy
• Leak detectors
• R & D UHV systems
• Load locks and transfer chambers