Powerful turbopump with a pumping speed of up to 1450 l/s DN 200 ISO-K flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications Compression ratio for Ar > 1·108 Compression ratio for CF4 > 1·108 Compression ratio for H2 ... more info

Powerful turbopump with a pumping speed of up to 1900 l/s DN 250 ISO-K flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications   Compression ratio for Ar > 1·108 Compression ratio for CF4 > 1·108 Compression ratio for ... more info

HiPaceTM 2300 Powerful turbopump with a pumping speed of up to 1900 l/s DN 250 CF-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum ... more info

HiPaceTM 2300 Powerful turbopump with a pumping speed of up to 1900 l/s DN 250 ISO-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum ... more info

HiPaceTM 300 Rugged, powerful turbopump with a pumping speed of up to 260 l/s for N2 Integrated TC 110 drive electronics, DN 100 CF-F flange Ideal for UHV applications For installation in any orientation Extensive accessories expand the range of applications - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass coating - Surface ... more info

HiPaceTM 300 Rugged, powerful turbopump with a pumping speed of up to 260 l/s for N2 Integrated TC 110 drive electronics, DN 100 ISO-F flange Ideal for analytical and industrial applications For installation in any orientation Extensive accessories expand the range of applications - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass ... more info

HiPaceTM 300 Rugged, powerful turbopump with a pumping speed of up to 260 l/s for N2 Integrated TC 110 drive electronics, DN 100 ISO-K flange Ideal for analytical and industrial applications For installation in any orientation Extensive accessories expand the range of applications - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass ... more info

Rugged, powerful turbopump with a pumping speed of up to 260 l/s for N2 Integrated TC 400 drive electronics, DN 100 CF-F flange Ideal for UHV applications For installation in any orientation With integrated water cooling for maximum gas throughput Flexible through the ability to employ up to 4 accessories Ideal for fast cycles Extensive accessories expand the range of applications   Compression ratio for Ar > 1·1011 Compression ratio for CF4 > 1·1011 ... more info

Rugged, powerful turbopump with a pumping speed of up to 260 l/s for N2 Integrated TC 400 drive electronics, DN 100 ISO-F flange Ideal for UHV applications For installation in any orientation With integrated water cooling for maximum gas throughput Flexible through the ability to employ up to 4 accessories Ideal for fast cycles Extensive accessories expand the range of applications Compression ratio for Ar > 1·1011 Compression ratio for CF4 > 1·1011 ... more info

Rugged, powerful turbopump with a pumping speed of up to 260 l/s for N2 Integrated TC 400 drive electronics, DN 100 ISO-K flange Ideal for UHV applications For installation in any orientation With integrated water cooling for maximum gas throughput Flexible through the ability to employ up to 4 accessories Ideal for fast cycles Extensive accessories expand the range of applications Compression ratio for Ar > 1·1011 Compression ratio for CF4 > 1·1011 ... more info

HiPaceTM 400 Compact yet powerful turbopump with a pumping speed of up to 355 l/s for N2 Integrated TC 400 drive electronics, DN 100 CF-F flange for UHV applications For installation in any orientation Integrated, powerful cooling system Corrosive gas version available - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass coating - ... more info

HiPaceTM 400 Compact yet powerful turbopump with a pumping speed of up to 355 l/s for N2 Integrated TC 400 drive electronics, DN 100 ISO-F flange For installation in any orientation Integrated, powerful cooling system Corrosive gas version available - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass coating - Surface refinement - ... more info

HiPaceTM 400 Compact yet powerful turbopump with a pumping speed of up to 355 l/s for N2 Integrated TC 400 drive electronics, DN 100 ISO-K flange For installation in any orientation Integrated, powerful cooling system Corrosive gas version available - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass coating - Surface refinement - ... more info

HiPaceTM 700 Compact yet powerful turbopump with a pumping speed of up to 685 l/s for N2 Maximum vacuum performance with minimum power consumption Integrated TC 400 drive electronics, DN 160 CF-F flange for demanding UHV applications For installation in any orientation Integrated, powerful cooling system Corrosive gas version available - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering ... more info

HiPaceTM 700 Compact yet powerful turbopump with a pumping speed of up to 685 l/s for N2 Maximum vacuum performance with minimum power consumption Integrated TC 400 drive electronics, DN 160 ISO-F flange For installation in any orientation Integrated, powerful cooling system Corrosive gas version available - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum ... more info

HiPaceTM 700 Compact yet powerful turbopump with a pumping speed of up to 685 l/s for N2 Maximum vacuum performance with minimum power consumption For installation in any orientation Integrated TC 400 drive electronics, DN 160 ISO-K flange Integrated, powerful cooling system Corrosive gas version available - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum ... more info

HiPaceTM 80 Small yet powerful turbopump with a pumping speed of up to 35 l/s for N2 Integrated TC 110 drive electronics, DN 40 ISO-KF flange For installation in any orientation Ideal for dependable systems integration Extensive accessories expand the range of applications - Thin film technology - Tool coating - Optical coatings - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma coating - Vacuum process technology - Glass coating - ... more info

HiPaceTM 80 Small yet powerful turbopump with a pumping speed of up to 67 l/s for N2 Integrated TC 110 drive electronics, DN 63 CF-F flange For installation in any orientation Ideal for dependable systems integration Extensive accessories expand the range of applications - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy PMP03941 Hi Pace Family Operating ... more info

HiPaceTM 80 Small yet powerful turbopump with a pumping speed of up to 67 l/s for N2 Integrated TC 110 drive electronics, DN 63 ISO-K flange For installation in any orientation Ideal for dependable systems integration Extensive accessories expand the range of applications - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy PMP03940 Hi Pace Family Operating ... more info

The Turbo-V 2K-G System The first application -specific pumping solution for thin-film deposition equipment The highest-performing, most compact unit available The first fully integrated approach for maximum system productivity and uptime The integrated package the turbomolecular pump, drive electronics, power supply, MoniTorr, purge gas fittings, and electronic communication The versatile electronics interface with easy-to-use software Analog I/O signals and RS-232/RS-485 interfaces are ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: ... more info

The Varian, Inc. Turbo-V 3K-T turbomolecular pump is a versatile, high-performance 2000 l/s system that is designed for scientific and research applications as well as industrial production environments. The Turbo-V 3K-T is a complete vacuum pumping system in one compact package, with innovative features such as control circuitry on board and intelligent MoniTorr technology. Varian, Inc. is the only manufacturer that offers turbo pumps with fully integrated electronics in combination with a ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:   maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation. Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation. Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation. Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation. Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech ... more info

VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps: High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work ... more info

VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps: High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work ... more info

VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps: High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work ... more info

VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps: High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases   keep the size and weight of the pump to a minimum Very high gas-load ... more info

Typical Applications Helium leak detectors Mass spectrometers (gas chromatography GC-MS), liquid chromatography (LC-MS), residual gas analysis, mobile analytical systems, etc.) Electron beam microscopy XHV-/UHV systems Transfer chambers Technical Features   Oil free pump High pressure foreline tolerance Excellent resistance to vibration due to proven mechanical bearings Efficient convection cooling due to a large number of cooling fins Purge gas/venting connection Installation ... more info

Typical Applications Helium leak detectors Mass spectrometers (gas chromatography GC-MS), liquid chromatography (LC-MS), residual gas analysis, mobile analytical systems, etc.) Electron beam microscopy XHV-/UHV systems Transfer chambers Technical Features   Oil free pump High pressure foreline tolerance Excellent resistance to vibration due to proven mechanical bearings Efficient convection cooling due to a large number of cooling fins Purge gas/venting connection Installation ... more info

Typical Applications Helium leak detectors Mass spectrometers (gas chromatography GC-MS), liquid chromatography (LC-MS), residual gas analysis, mobile analytical systems, etc.) Electron beam microscopy XHV-/UHV systems Transfer chambers Technical Features   Oil free pump High pressure foreline tolerance Excellent resistance to vibration due to proven mechanical bearings Efficient convection cooling due to a large number of cooling fins Purge gas/venting connection Installation ... more info

Alcatel ATP100 Molecular Turbo Pump Inlet Flange: CF100 Pumping Speed L/S: Nitrogen: 100 Helium: 60 Hydrogen: 40 Compression Ratio 8 x 10/7 2500 300 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 3x10-1 Outlet Flange: NW25 Weight (lb): 12

Alcatel ATP100 Molecular Turbo Pump Inlet Flange: ISO100 Pumping Speed L/S: Nitrogen: 100 Helium: 60 Hydrogen: 40 Compression Ratio 8 x 10/7 2500 300 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 3x10-1 Outlet Flange: NW25 Weight (lb): 12

Alcatel ATP150 Molecular Turbo Pump Inlet Flange: CF100 Pumping Speed L/S: Nitrogen: 140 Helium: 100 Hydrogen: 80 Compression Ratio 7 x 10/8 1.2 x 10/4 1 x 10/3 Ultimate Pressure (mbar): 10-10 Startup Time (min): 2 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 4x10-1 Outlet Flange: NW25 Weight (lb): 14

Alcatel ATP150 Molecular Turbo Pump Inlet Flange: ISO100 Pumping Speed L/S: Nitrogen: 140 Helium: 100 Hydrogen: 80 Compression Ratio 7 x 10/8 1.2 x 10/4 1 x 10/3 Ultimate Pressure (mbar): 10-10 Startup Time (min): 2 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 4x10-1 Outlet Flange: NW25 Weight (lb): 14

Alcatel ATP400 Molecular Turbo Pump Inlet Flange: CF160 Pumping Speed L/S: Nitrogen: 400 Helium: 300 Hydrogen: 250 Compression Ratio 7 x 10/8 1.5 x 10/4 1 x 10/3 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 2x10-1 Outlet Flange: NW40 Weight (lb): 20

Alcatel ATP400 Molecular Turbo Pump Inlet Flange: ISO160 Pumping Speed L/S: Nitrogen: 400 Helium: 300 Hydrogen: 250 Compression Ratio 7 x 10/8 1.5 x 10/4 1 x 10/3 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 2x10-1 Outlet Flange: NW40 Weight (lb): 20

Alcatel ATP80 Molecular Turbo Pump Inlet Flange: CF63 Pumping Speed L/S: Nitrogen: 80 Helium: 50 Hydrogen: 40 Compression Ratio 8 x 10/7 2500 300 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 2x10-1 Outlet Flange: NW25 Weight (lb): 10

Alcatel ATP80 Molecular Turbo Pump Inlet Flange: ISO63 Pumping Speed L/S: Nitrogen: 80 Helium: 50 Hydrogen: 40 Compression Ratio 8 x 10/7 2500 300 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 2x10-1 Outlet Flange: NW25 Weight (lb): 10

Alcatel ATP900 Molecular Turbo Pump Inlet Flange: CF200 Pumping Speed L/S: Nitrogen: 900 Helium: 540 Hydrogen: 300 Compression Ratio 7 x 10/8 1.5 x 10/4 1 x 10/3 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 2x10-1 Outlet Flange: NW40 Weight (lb): 40

Alcatel ATP900 Molecular Turbo Pump Inlet Flange: ISO200 Pumping Speed L/S: Nitrogen: 900 Helium: 540 Hydrogen: 300 Compression Ratio 7 x 10/8 1.5 x 10/4 1 x 10/3 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 2x10-1 Outlet Flange: NW40 Weight (lb): 40

Alcatel MDP5011 Molecular Turbo Pump Inlet Flange: ISO63 Pumping Speed L/S: Nitrogen: 7.5 Helium: 4 Hydrogen: 3 Compression Ratio 10/9 10/4 10/3 Ultimate Pressure (mbar): 10-6 Startup Time (min): 1 Rotational Speed (rpm): 27000 Orientation: Any Backing Pressure (mbar): 20 Outlet Flange: NW16 Weight (lb): 7

Edwards EXT255DX  Turbo Pump Inlet Flange: CF100 Pumping Speed L/S: Nitrogen: 220 Helium: 230 Hydrogen: 180 Compression Ratio 1 x 10/8 4 x 10/5 1.6 x 10/4 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW25 Weight (lb): 13

Edwards EXT255DX  Turbo Pump Inlet Flange: ISO100 Pumping Speed L/S: Nitrogen: 220 Helium: 230 Hydrogen: 180 Compression Ratio 1 x 10/8 4 x 10/5 1.6 x 10/4 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW25 Weight (lb): 13

Edwards EXT255H  Turbo Pump Inlet Flange: CF100 Pumping Speed L/S: Nitrogen: 220 Helium: 230 Hydrogen: 180 Compression Ratio 1 x 10/3 4 x 10/5 1.6 x 10/4 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW25 Weight (lb): 13

Edwards EXT255H  Turbo Pump Inlet Flange: ISO100 Pumping Speed L/S: Nitrogen: 220 Helium: 230 Hydrogen: 180 Compression Ratio 1 x 10/3 4 x 10/5 1.6 x 10/4 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW25 Weight (lb): 13

Edwards EXT255HI  Turbo Pump Inlet Flange: ISO100 Pumping Speed L/S: Nitrogen: 220 Helium: 230 Hydrogen: 180 Compression Ratio 1 x 10/3 4 x 10/5 1.6 x 10/4 Ultimate Pressure (mbar): 10-10 Startup Time (min): 3 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW25 Weight (lb): 13

Edwards EXT406PX  Turbo Pump Inlet Flange: CF100 Pumping Speed L/S: Nitrogen: 380 Helium: 400 Hydrogen: 340 Compression Ratio 1 x 10/11 2 x 10/6 2 x 10/4 Ultimate Pressure (mbar): 10-11 Startup Time (min): 5 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 8 Outlet Flange: NW25 Weight (lb): 14

Edwards EXT406PX  Turbo Pump Inlet Flange: CF160 Pumping Speed L/S: Nitrogen: 380 Helium: 400 Hydrogen: 340 Compression Ratio 1 x 10/11 2 x 10/6 2 x 10/4 Ultimate Pressure (mbar): 10-11 Startup Time (min): 5 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 8 Outlet Flange: NW25 Weight (lb): 14

Edwards EXT406PX  Turbo Pump Inlet Flange: ISO100 Pumping Speed L/S: Nitrogen: 380 Helium: 400 Hydrogen: 340 Compression Ratio 1 x 10/11 2 x 10/6 2 x 10/4 Ultimate Pressure (mbar): 10-11 Startup Time (min): 5 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 8 Outlet Flange: NW25 Weight (lb): 14

Edwards EXT406PX  Turbo Pump Inlet Flange: ISO160 Pumping Speed L/S: Nitrogen: 380 Helium: 400 Hydrogen: 340 Compression Ratio 1 x 10/11 2 x 10/6 2 x 10/4 Ultimate Pressure (mbar): 10-11 Startup Time (min): 5 Rotational Speed (rpm): 60000 Orientation: Any Backing Pressure (mbar): < 8 Outlet Flange: NW25 Weight (lb): 14

Edwards EXT70  Turbo Pump Inlet Flange: CF63 Pumping Speed L/S: Nitrogen: 65 Helium: 60 Hydrogen: 50 Compression Ratio 1 x 10/7 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < 0.1 Outlet Flange: NW16 Weight (lb): 6

Edwards EXT70  Turbo Pump Inlet Flange: ISO63 Pumping Speed L/S: Nitrogen: 65 Helium: 60 Hydrogen: 50 Compression Ratio 1 x 10/7 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < 0.1 Outlet Flange: NW16 Weight (lb): 6

Edwards EXT70  Turbo Pump Inlet Flange: NW40 Pumping Speed L/S: Nitrogen: 65 Helium: 60 Hydrogen: 50 Compression Ratio 1 x 10/7 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < 0.1 Outlet Flange: NW16 Weight (lb): 6

Edwards EXT70H  Turbo Pump Inlet Flange: CF63 Pumping Speed L/S: Nitrogen: 65 Helium: 60 Hydrogen: 50 Compression Ratio 1 x 10/8 4 x 10/5 3 x 10/4 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW16 Weight (lb): 4

Edwards EXT70H  Turbo Pump Inlet Flange: ISO63 Pumping Speed L/S: Nitrogen: 65 Helium: 60 Hydrogen: 50 Compression Ratio 1 x 10/8 4 x 10/5 3 x 10/4 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW16 Weight (lb): 4

Edwards EXT70H  Turbo Pump Inlet Flange: NW40 Pumping Speed L/S: Nitrogen: 65 Helium: 60 Hydrogen: 50 Compression Ratio 1 x 10/8 4 x 10/5 3 x 10/4 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < 5 Outlet Flange: NW16 Weight (lb): 4

Edwards EXT75DX  Turbo Pump Inlet Flange: CF63 Pumping Speed L/S: Nitrogen: 61 Helium: 57 Hydrogen: 53 Compression Ratio 1 x 10/1 1 x 10/6 1 x 10/4 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < a5 Outlet Flange: NW16 Weight (lb): 6

Edwards EXT75DX  Turbo Pump Inlet Flange: ISO63 Pumping Speed L/S: Nitrogen: 61 Helium: 57 Hydrogen: 53 Compression Ratio 1 x 10/1 1 x 10/6 1 x 10/4 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < a5 Outlet Flange: NW16 Weight (lb): 6

Edwards EXT75DX  Turbo Pump Inlet Flange: NW40 Pumping Speed L/S: Nitrogen: 61 Helium: 57 Hydrogen: 53 Compression Ratio 1 x 10/1 1 x 10/6 1 x 10/4 Ultimate Pressure (mbar): 10-9 Startup Time (min): 2 Rotational Speed (rpm): 90000 Orientation: Any Backing Pressure (mbar): < a5 Outlet Flange: NW16 Weight (lb): 6

Leybold Turbovac TMP 1000 C Turbo Pump with ISO 250 Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1000 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-20 Turbo Pump controller is needed to operate Leybold Turbovac TMP 1000C ... more info

Leybold Turbovac TMP 1000 C Turbo Pump with ISO 160 Inlet Flange, ISO-63 Outlet Flange. Pumping speed: for N2 560 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-20 Turbo Pump controller is needed to operate Leybold Turbovac TMP 1000C ... more info

Leybold Turbovac TMP 1100 C Turbo Pump with ISO 200 Inlet Flange, ISO-63 Outlet Flange. Pumping speed: for N2 830 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-20 Turbo Pump controller is needed to operate Leybold Turbovac TMP 1000C ... more info

Leybold Turbovac TMP 150 Turbo Pump with ISO 100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 150 l/s, Ultimate pressure with rotary vane pump 5x10-8 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-150/360 Turbo Pump controller is needed to operate Leybold Turbovac TMP 150 ... more info

Leybold Turbovac TMP 151 C Turbo Pump with ISO 100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 150 l/s, Ultimate pressure with rotary vane pump 5x10-8 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-151/361 Turbo Pump controller is needed to operate Leybold Turbovac TMP ... more info

Leybold Turbovac TMP 361 Turbo Pump with ISO100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 345 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-151/361 Turbo Pump controller is needed to operate Leybold Turbovac TMP 361 Turbo ... more info

Leybold Turbovac TMP 361C Turbo Pump with ISO 100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 345 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-151/361 Turbo Pump controller is needed to operate Leybold Turbovac TMP ... more info

Leybold Turbovac TMP 50 Turbo Pump with KF40 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 33 l/s, Ultimate pressure with rotary vane pump 5x10-8 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-10 Turbo Pump controller is needed to operate Leybold Turbovac TMP 50 Turbo Pump. ... more info

Leybold Turbovac TMP 50 Turbo Pump with ISO 63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 55 l/s, Ultimate pressure with rotary vane pump 5x10-8 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-10 Turbo Pump controller is needed to operate Leybold Turbovac TMP 50 Turbo Pump. ... more info

Leybold Turbovac TMP 600C Turbo Pump with ISO 160 Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 600 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. T urbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Leybold Turbotronic NT-20 Turbo Pump controller is needed to operate Leybold Turbovac TMP 600C ... more info

Feature Integrated or external frequency converter Compact design Operation in any orientation High foreline tolerance An oil-free pump for generating clean hig and ultrahigh-vacuum conditions Advantages to the User Space-saver Easy to integrate into complex vacuum systems Enables the use of down-sized, foreline vacuum pumps Low operating costs Highly reliable operation Applications Mass spectrometers Electron beam microscopy Leak detectors R & D UHV systems Load locks and ... more info

Feature Integrated or external frequency converter Compact design Operation in any orientation High foreline tolerance An oil-free pump for generating clean hig and ultrahigh-vacuum conditions Advantages to the User Space-saver Easy to integrate into complex vacuum systems Enables the use of down-sized, foreline vacuum pumps Low operating costs Highly reliable operation Applications Mass spectrometers Electron beam microscopy Leak detectors R & D UHV systems Load locks and ... more info

Pfeiffer-Vacuum TMH 520 ISO 160  Inlet Flange, KF-25 Outlet Flange. Turbomolecular Drag Pump. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum TCP-310 or ... more info

Pfeiffer-Vacuum TMU 1000 PC Turbomolecular Drag Pump with  DN-200 CF Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1000 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. ... more info

Pfeiffer-Vacuum TPH 1201 PC Turbomolecular Pump with DN-200 ISO Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1200 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The Pfeiffer ... more info

Pfeiffer-Vacuum TMH 064 ISO 63, KF-16 Outlet Flange. Pumping speed: for N2 53 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TMH and TMU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range ... more info

Pfeiffer-Vacuum TMH 065 ISO 63 or CF 63 Conflat Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 56 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TMH and TMU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo ... more info

Pfeiffer-Vacuum TMH 1000 PC Turbomolecular Drag Pump with DN-200 ISO Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1000 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The Pfeiffer ... more info

Pfeiffer-Vacuum TMH 1001 PC Turbomolecular Drag Pump with DN-200 ISO Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1000 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The ... more info

Pfeiffer-Vacuum TMH 260 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-120 or TCP-310 or TCP-380 Turbo Pump ... more info

Pfeiffer-Balzers TMH 260-010 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-120 or TCP-310 or TCP-380 Turbo ... more info

Pfeiffer-Vacuum TMH 261 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum DCU-200 Turbo Pump controller or TPS-200 ... more info

Pfeiffer-Vacuum TMH-261-130 Turbomolecular Pump 2x DN 100 ISO Inlet Flange, KF 25 Outlet Flange. Pumping speed: for N2 210-130 l/s, Ultimate pressure with rotary vane pump < 1x10-9 mbar, Gas throughput for N2 7 mbar l/s, Fore Vacuum max. for N2 10 mbar, Sealing gas connection: yes, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput. Turbo pump designed for a wide range of applications in research ... more info

Pfeiffer-Vacuum TMH 261-250-010 Turbomolecular Pump with 2X ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum DCU-200 ... more info

Pfeiffer-Vacuum TMH 261-250-010 Turbomolecular Pump with 2X ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum DCU-200 ... more info

Pfeiffer-Vacuum TMH 262 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum DCU-200 Turbo Pump controller or TPS-200 ... more info

Pfeiffer-Vacuum TMH 071P ISO 63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 60 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TMH and TMU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for ... more info

Pfeiffer-Vacuum TMU 071P CF 63 Conflat Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 60 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TMH and TMU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump ... more info

Pfeiffer-Vacuum TMU 1001 PC Turbomolecular Drag Pump with DN-200 CF Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1000 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The ... more info

Pfeiffer-Vacuum TMU 1601P Turbomolecular Drag Pump with DN-250 CF Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1600 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The ... more info

Pfeiffer-Vacuum TMU 260 with CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-120 or TCP-310 or TCP-380 ... more info

Pfeiffer-Vacuum TMU 261 CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum DCU-200 Turbo Pump controller or ... more info

Pfeiffer-Vacuum TMU 262 CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum DCU-200 Turbo Pump controller or ... more info

Pfeiffer-Vacuum TMU 520 Turbomolecular Drag Pump with DN-160 CF Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Vacuum ... more info

Pfeiffer-Vacuum TMU CF 63 Conflat Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 53 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TMH and TMU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed ... more info

Pfeiffer-Vacuum TMU 065 CF 63 Conflat Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 56 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TMH and TMU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump ... more info

Pfeiffer-Balzers TPH 062 ISO63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 56 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for ... more info

Pfeiffer-Balzers TPH 170, ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 170 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The installation attitude can be selected from vertical to horizontal. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPH 170. Pump is fully rebuilt and comes with full 12-months warranty. Turbo pump designed for a wide range of ... more info

Pfeiffer Vacuum TPH 180 C Plasma, DN 100 ISO Inlet Flange, KF 25 Outlet Flange. Pumping speed: for N2 170 l/s, Ultimate pressure with rotary vane pump < 1x·10-10 mbar, Gas throughput for N2 7 mbar l/s, Fore Vacuum max. for N2 10 mbar, Sealing gas connection: yes, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput. High compression ratios and improved critical backing pressures for greater ... more info

Pfeiffer-Balzers TPH ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 180 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 3 m3. Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a ... more info

Pfeiffer-Balzers TPH 190 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 190 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-120 or TCP-310 or TCP-380 Turbo Pump ... more info

Pfeiffer-Vacuum TPH 2101 PC Turbomolecular Pump with ISO 200 Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1900 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The Pfeiffer Vacuum ... more info

Pfeiffer-Vacuum TPH 2200 PC Turbomolecular Pump with ISO 250 Inlet Flange, ISO-63 Outlet Flange. Pumping speed: for N2 2100 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The Pfeiffer Vacuum ... more info

Pfeiffer-Balzers TPH 240 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-120 or TCP-310 or TCP-380 Turbo Pump ... more info

Pfeiffer Vacuum TPH 240 C Plasma, DN 100 ISO Inlet Flange, KF 25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump < 1x10-8 mbar, Gas throughput for N2 7 mbar l/s, Fore Vacuum max. for N2 10 mbar, Sealing gas connection: yes, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput Turbo pump designed for a wide range of applications in industry and research. The ... more info

Pfeiffer-Balzers TPH-330 ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 330 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPH/TPU 330. Turbo pump designed for a wide range of applications in research industry. Pump is fully rebuilt and tested and comes with full 12-MONTHS WARRANTY !

Pfeiffer-Balzers TPH-510 with ISO-160  Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPH 510. Turbo pump designed for a wide range of applications in research industry. Pump is fully rebuilt and tested and comes with full 12-MONTHS WARRANTY !

Pfeiffer-Balzers TPH-510 Plasma for Corrosive Service, with ISO-160 Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPH 510. Turbo pump designed for a wide range of applications in research industry. Pump is fully rebuilt and tested and comes with full 12-MONTHS ... more info

Pfeiffer-Balzers TPH 520 DN-160-ISO Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-310 or TCP-380 Turbo Pump ... more info

Pfeiffer-Balzers TPU 060 CF63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 56 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for ... more info

Pfeiffer-Balzers TPU 062 CF63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 56 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a ... more info

Pfeiffer-Vacuum TPU 1501 PC Turbomolecular Pump with DN-200 CF Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1500 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The ... more info

Pfeiffer-Balzers TPU 170, CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 170 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The installation attitude can be selected from vertical to horizontal. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPU 170. Pump is fully rebuilt and comes with full 12-months warranty. Turbo pump designed for a wide range ... more info

Pfeiffer-Balzers TPU 180H CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 180 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 3 m3. Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump ... more info

Pfeiffer-Balzers TPU 240 CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 230 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-120 or TCP-310 or TCP-380 Turbo ... more info

Pfeiffer-Balzers TPU 510 CF160 Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPH 510. Turbo pump designed for a wide range of applications in research industry. Pump is fully rebuilt and tested and comes with full 12-MONTHS WARRANTY !

Pfeiffer-Balzers TPU 520 CF160 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 500 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry. The Pfeiffer Balzers TCP-310 or TCP-380 Turbo Pump ... more info

Pfeiffer-Vacuum TPU 2200 PC Turbomolecular Pump with DN-250 CF Conflat Inlet Flange, ISO-63 Outlet Flange. Pumping speed: for N2 2100 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The ... more info

Pfeiffer-Balzers TPU 330 CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 330 l/s, Ultimate pressure with rotary vane pump < 1x10-10 mbar, Air or Water Cooling available. Pump equipped with two ceramic bearings. The Pfeiffer Balzers TCP-310 Turbo Pump controller is needed to operate TPH/TPU 330. Turbo pump designed for a wide range of applications in research industry. Pump is fully rebuilt and tested and comes with full 12-MONTHS WARRANTY !

Pfeiffer-Vacuum TMH 1600 PC Turbomolecular Drag Pump with ISO-200 Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 1100 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and semiconductor industry. The Pfeiffer ... more info

Pfeiffer-Vacuum TMU 1601 P Turbomolecular Drag Pump with DN-250 ISO or DN-250 CF Conflat Inlet Flange, KF-40 Outlet Flange.   Pumping speed: for N2 1600 l/s, Ultimate pressure with rotary vane pump 1x10-10 mbar, Recommended Backing Pump 16 m3. Air or Water Cooling available. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research and ... more info

Pfeiffer-Balzers TPH-050 ISO 63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 50 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed ... more info

Pfeiffer-Balzers TPH-060 ISO 63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 56 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed ... more info

Pfeiffer-Balzers TPH-050 CF 63 Conflat Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 50 l/s, Ultimate pressure with rotary vane pump < 1x•10-10 mbar, Recommended Backing Pump 1.5 m3 Air or Water Cooling available. The Turbo Pumps TPH and TPU models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump ... more info

High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size. MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can: maximize the throughput of the pump work with foreline pressures as high as 18 mbar increase the compression ratio by decades, most notably for light gases keep the size and weight of the pump to a minimum Very high gas-load capabilities: Thanks to ... more info

Varian TV551 Navigator Turbo Pump with ISO 160 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 550 l/s, Ultimate pressure with rotary vane pump 5x10-9 mbar, Recommended Backing Pump 3-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Varian V-550 Turbo Pump controller is needed to operate Varian TV-551 Navigator Turbo Pump. This Pump ... more info

Varian V-1000ICE with DN200 ISO Inlet Flange, KF-40 Outlet Flange. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Varian V-1000HT with DN-200 CF Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Varian V-1000HT with DN200 ISO Inlet Flange, KF-40 Outlet Flange. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Pumping Speeds: N2: 250 l/s He: 220 l/s H2: 200 l/s Compression Ratio: N2: 2 x 108 He: 1 x 105 H2: 1 x 104 Base Pressure: With Recommended Mechanical Forepump: 2 x 10-10 (1.5 x 10-10 Torr) With Recommended Diaphragm Pump: 2 x 10-8 (1.5 x 10-8 Torr) Inlet Flange: DN 100 CF Foreline Flange: NW25 KF Rotational Speed: 56,000 RPM Startup Time: < 3 min. Minimum Recommended Forepump: Two-Stage Rotary Pump: SD 300 Diaphragm Pump: MD 60 Operation Position: Any Cooling Requirements: Forced ... more info

Pumping Speeds: N2: 250 l/s He: 220 l/s H2: 200 l/s Compression Ratio: N2: 2 x 108 He: 1 x 105 H2: 1 x 104 Base Pressure: With Recommended Mechanical Forepump: 2 x 10-10 (1.5 x 10-10 Torr) With Recommended Diaphragm Pump: 2 x 10-8 (1.5 x 10-8 Torr) Inlet Flange: DN 100 ISO Foreline Flange: NW25 KF Rotational Speed: 56,000 RPM Startup Time: < 3 min. Minimum Recommended Forepump: Two-Stage Rotary Pump: SD 300 Diaphragm Pump: MD 60 Operation Position: Any Cooling Requirements: Forced ... more info

Varian V300HT Turbo Pump with ISO 100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 250 l/s, Ultimate pressure with rotary vane pump 5x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Varian V-300 Turbo Pump controller is needed to operate Varian V-300HT Turbo Pump. This Pump is fully rebuilt ... more info

Varian V301 Navigator Turbo Pump with ISO 100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 250 l/s, Ultimate pressure with rotary vane pump 5x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Varian V-301 Turbo Pump controller is needed to operate Varian V-301 Navigator Turbo Pump. This Pump ... more info

Varian V301 Nested Turbo Pump with ISO 100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 250 l/s, Ultimate pressure with rotary vane pump 5x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Varian V-301 Turbo Pump controller is needed to operate Varian V-301 Navigator Turbo Pump. This Pump is ... more info

Varian V550 Turbo Pump with ISO 160 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 550 l/s, Ultimate pressure with rotary vane pump 5x10-9 mbar, Recommended Backing Pump 3-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Varian V-550 Turbo Pump controller is needed to operate Varian V-550 Turbo Pump. This Pump is fully rebuilt and ... more info

Varian V60 Turbo Pump with ISO 63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 58 l/s, Ultimate pressure with rotary vane pump 5x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Varian V-60 Turbo Pump controller is needed to operate Varian V-60 Turbo Pump. This Pump is fully rebuilt and comes ... more info

Varian V801 SCIEX DN160 ISO DN160 ISO F Inflet Flange, KF 25 Outlet Flange Pump is available as a Exchange ONLY

Alcatel 5030 Turbo Pump, Pumping speed 30 l/sec. ISO-100 Inlet Flange, KF 25 Outlet flange. Ultimate pressure up to 10-6 mbar. The MDP 5030 offers an ideal pumping solution between turbo and roots pumps. The MDP 5011 is light weight and compact making it the ideal dry pump for numerous applications, such as: Fast evacuation of small volumes, Interseal pumping, Leak detection, Spectrometry, Production of Light bulbs, Production of electronic tubes, High-quality freeze drying.

Alcatel 5080 CF-63 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 80 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry. The Alcatel CFV-100 Turbo Pump controller is needed to operate Alcatel 5080 Turbo Pump. This Pump is fully rebuilt and comes with FULL 12-MONTHS WARRANTY !

Alcatel 5150 Turbo Pump with ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 140 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel CFF-450 Turbo Pump controller is needed to operate Alcatel 5150 Turbo Pump. This Pump is fully rebuilt ... more info

Alcatel 5150 Turbo Pump with CF-100 Conflat Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 140 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel CFF-450 Turbo Pump controller is needed to operate Alcatel 5150 Turbo Pump. This Pump is fully ... more info

Alcatel ATH-20/40 Turbo Pump with CF-63 Conflat Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 20/40 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel ACT 200 Turbo Pump controller is needed to operate Alcatel ATH 20/40 Turbo Pump. This ... more info

Alcatel ATP 150 Turbo Pump with ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 140 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel ACT 600T Turbo Pump controller is needed to operate Alcatel ATP 150 Turbo Pump. This Pump is fully ... more info

Alcatel ATP 400 Turbo Pump CF-160 Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 400 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel ACT 600T Turbo Pump controller is needed to operate Alcatel ATP 400 Turbo Pump. This Pump is fully ... more info

Alcatel ATP 400 Turbo Pump w/  ISO-160 Conflat Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 400 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel ACT 600T Turbo Pump controller is needed to operate Alcatel ATP 400 Turbo Pump. This ... more info

Alcatel ATP 900 C Turbo Pump with ISO-200 Inlet Flange, KF-40 Outlet Flange. Pumping speed: for N2 900 l/s, Ultimate pressure with rotary vane pump 1x10-9 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Alcatel ACT 1000T Turbo Pump controller is needed to operate Alcatel ATP 900 C Turbo Pump. This Pump is ... more info

Alcatel MDP 5011, Pumping speed 7.5 l/sec. ISO-63 Inlet Flange, KF 16 Outlet flange. Ultimate pressure up to 10-6 mbar. The MDP 5011 offers an ideal pumping solution between turbo and roots pumps. The MDP 5011 is light weight and compact making it the ideal dry pump for numerous applications, such as: Fast evacuation of small volumes, Interseal pumping, Leak detection, Spectrometry, Production of Light bulbs, Production of electronic tubes, High-quality freeze drying.

Edwards EXT 200 / 200 Turbo Pump with 2x ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 200 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Mass spectrometers. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-255HI Turbo Pump. This Pump is fully rebuilt and comes with FULL 6-MONTHS WARRANTY !

Edwards EXT 250 Turbo Pump with ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 220 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-250 Turbo Pump. This ... more info

Edwards EXT 255H Turbo Pump with CF-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 220 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-255H Turbo Pump. This Pump ... more info

Edwards EXT 255H Turbo Pump with ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 220 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-255H Turbo Pump. This ... more info

Edwards EXT 255HI Turbo Pump with ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 220 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-255HI Turbo Pump. This ... more info

Edwards EXT 255HVI Turbo Pump with ISO-100 Inlet Flange, KF-25 Outlet Flange. Pumping speed: for N2 220 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-255H Turbo Pump. This ... more info

Edwards EXT 70 Turbo Pump with ISO-63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 65 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-70 Turbo Pump. This Pump is ... more info

Edwards EXT 70H Turbo Pump with ISO-63 Inlet Flange, KF-16 Outlet Flange. Pumping speed: for N2 65 l/s, Ultimate pressure with rotary vane pump 5x10-10 mbar, Recommended Backing Pump 1.5-16 m3. Air Cooling available. Turbo pump designed for a wide range of applications in research industry, Space simulation, Thin film deposition, Ion source, Mass spectrometer, leak detection. The Edwards EXC-100 or EXC 120 Turbo Pump controller is needed to operate Edwards EXT-70H Turbo Pump. This Pump ... more info

Features and Benefits On-board intelligent control gives ability to run at reduced power for lower cost of ownership. In addition, the controller adds electronic braking, smart cooling fan and automatic vent options. Compatible with Edwards TIC Turbo and Instrument Controller meaning you can add one or more vacuum gauges without the need of an additional display controller. Parallel or serial interface. Parallel mode allows traditional control signal interface. Serial mode gives ... more info

Pfeiffer-Vacuum TMH-064 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Vacuum TCP-121 Pump Controller Pumping speed: for 55 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-071P with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Vacuum DCU 100 Pump Controller Pumping speed: for 60 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TMH-260 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with Pfeiffer-Balzers TCP-120 Power Supply. Pumping speed: for 210 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TMH-260 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with Pfeiffer-Balzers TCP-121 Pump Controller. Pumping speed: for 210 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-261P with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with TC-100 and Pfeiffer-Vacuum DCU-200 Pump Controller. Pumping speed: for 210 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-261P with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with TC-600 and Pfeiffer-Vacuum DCU-200 Pump Controller. Pumping speed: for 210 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-065 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Vacuum TCP-121 Pump Controller Pumping speed: for 55 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-520 with DN-160 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-121 Pump Controller. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-520 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-121 Pump Controller. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMH-521P with DN-160 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Vacuum DCU-300 Pump Controller. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Pfeiffer-Vacuum TMU-065 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Vacuum TCP-015 Pump Controller Pumping speed: for 55 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMU-065 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Vacuum TCP-121 Pump Controller Pumping speed: for 55 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Vacuum TMU-521P with DN-160 CF Conflat Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Vacuum DCU-300 Pump Controller. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.  

Pfeiffer-Balzers TPH-050 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Balzers TCP-040 Pump Controller. Pumping speed: for 50 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.  

Pfeiffer TPH 060 062 with TCP 120 Pumping speed: for 56 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-060/062 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Balzers TCP-121 Pump Controller Pumping speed: for 56 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-170 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with Pfeiffer-Balzers TCP-300 Pump Controller Pumping speed: for 170 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-240with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with Pfeiffer-Balzers TCP-120 Power Supply. Pumping speed: for 230 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-240 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with Pfeiffer-Balzers TCP-121 Pump Controller. Pumping speed: for 230 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-240 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, with Pfeiffer-Balzers TCP-300 Pump Controller. Pumping speed: for 230 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-330 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-121 Pump Controller. Pumping speed: for 300 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPH-330 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-310 Pump Controller. Pumping speed: for 300 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPU-060/062 with DN-63 CF Conflat Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Balzers TCP-120 Pump Controller Pumping speed: for 56 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research ... more info

Pfeiffer-Balzers TPU-060/062 with DN-63 CF Conflat Inlet Flange, KF-16 Outlet Flange, with Pfeiffer-Balzers TCP-121 Pump Controller Pumping speed: for 56 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 1.5-5 m3/h Air or Water Cooling available. Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPU-330 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-121 Pump Controller. Pumping speed: for 300 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPU-330 with DN-100 ISO Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-310 Pump Controller. Pumping speed: for 300 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Pfeiffer-Balzers TPU-510 with DN-160 CF Inlet Flange, KF-25 Outlet Flange, Pfeiffer-Balzers TCP-310 Pump Controller. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-10 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available. Pump has oil lubricated ceramic bearings, easy and simple maintenance. Turbo pump designed for a wide range of applications in research industry.

Varian V-1000 ICE with DN-250 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Varian V-1000 ICE Turbo Pump Power Supply. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Varian V-1000HT with DN-200 CF Conflat Inlet Flange, KF-40 Outlet Flange and Varian V-1000 Turbo Pump Power Supply. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Varian V-1000HT with DN-200 ISO Inlet Flange, KF-40 Outlet Flange and Varian V-1000 Turbo Pump Power Supply. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

Varian V-250 with DN-100 ISO Inlet Flange, KF-16 Outlet Flange and Varian V-250 Turbo Pump Power Supply. Pumping speed: for 230 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5 m3/h Air or Water Cooling available.

Varian V-550 with DN-160 ASA Inlet Flange, KF-25 Outlet Flange and Varian V-550 Turbo Pump Power Supply. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10 m3/h Air or Water Cooling available.

Varian V-550 with DN-160 ISO Inlet Flange, KF-25 Outlet Flange and Varian V-550 Turbo Pump Power Supply. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10 m3/h Air or Water Cooling available.

Varian V-551 with DN-160 ISO Inlet Flange, KF-25 Outlet Flange and Varian V-550 Turbo Pump Power Supply. Pumping speed: for 500 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10 m3/h Air or Water Cooling available.

Varian V-70 with DN-63 ISO Inlet Flange, KF-16 Outlet Flange and Varian V-70 Turbo Pump Controller. Pumping speed: for 60 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 150 with DN-100 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 150/360 Pump Controller. Pumping speed: for 150 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 1000C with DN-250 CF Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 1000C with DN-250 ISO Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.  

Leybold Turbovac TMP 1100C with DN-250 ISO Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 1050 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 151 with DN-100 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 151/361 Pump Controller. Pumping speed: for 150 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 151 with DN-100 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 150 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 361 with DN-160 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 151/361 Pump Controller. Pumping speed: for 345 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 361 with DN-100 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 151/361 Pump Controller. Pumping speed: for 345 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available

Leybold Turbovac TMP 361 with DN-100 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 345 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 1000C with DN-200 CF Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

Leybold Turbovac TMP 600 with DN-160 ISO Conflat Inlet Flange, KF-25 Outlet Flange and Leybold Turbotronic NT 20 Pump Controller. Pumping speed: for 550 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 5-10 m3/h Air or Water Cooling available.

HiCube 300 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 300 and MVP 040-2 dry diaphragm backing pump DN 100 CF-F 110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2422000 Operation Instructions Safety Guide

HiCube 300 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 300 and MVP 040-2 dry diaphragm backing pump DN 100 ISO-K 110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2322000 Operation Instructions Safety Guide

HiCube 300 Pro Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 300 and XtraDry 150-2 dry backing pump DN 100 CF-F 90-110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS4440000 Operation Instructions Safety Guide

HiCube 300 Pro Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 300 and XtraDry 150-2 dry backing pump DN 100 ISO-K 90-110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS4340000 Operation Instructions Safety Guide

HiCube 400 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 400 and MVP 070-3 dry diaphragm backing pump DN 100CF-F 110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2624000 Operation Instructions Safety Guide

HiCube 400 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 400 and MVP 070-3 dry diaphragm backing pump DN 100 ISO-K 110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2524000 Operation Instructions Safety Guide

HiCube 400 Pro Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 400 and XtraDry 150-2 dry backing pump DN 100 CF-F 90-110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS4640000 Operation Instructions Safety Guide

HiCube 400 Pro Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 400 and XtraDry 150-2 dry backing pump DN 100 ISO-K 90-110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS4540000 Operation Instructions Safety Guide

HiCube 700 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 700 and MVP 070-3 dry diaphragm backing pump DN 160 ISO-K 110 V AC, 60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2824000 Operation Instructions Safety Guide

HiCube 700 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 700 and MVP 070-3 dry diaphragm backing pump DN 160 ISO-K 110 V AC, 60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2724000 Operation Instructions Safety Guide

HiCube 700 Pro Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 700 and XtraDry 150-2 dry backing pump DN 160 ISO-K 90-110 V AC, 50/60 Hz   - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS4840000 Operation Instructions Safety Guide

HiCube 700 Pro Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 700 and XtraDry 150-2 dry backing pump DN 160 ISO-K 90-110 V AC, 50/60 Hz   - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS4740000 Operation Instructions Safety Guide

HiCube 80 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 80 and MVP 015-2 dry diaphragm backing pump DN 40 ISO-K 110 V AC, 50/60 Hz - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations PMS2120000 Operation Instructions Safety Guide

HiCube 80 Classic Combination pumping station incorporating turbopump and backing pump for all high vacuum applications Air-cooled and ready for operation with HiPace 80 and MVP 015-2 dry diaphragm backing pump DN 40 ISO-KF 110 V AC, 50/60 Hz Pumping Stations PMS2020000 Operation Instructions Safety Guide

HiCube 80 Eco Compact series of pumping stations for all high vacuum applications Air-cooled and ready for operation with HiPace 80 and MVP 015 dry diaphragm backing pump DN 63 ISO-K With DCU 002 90-132 V AC, 50/60 Hz ; 185-265 V AC, 50/60 Hz Pfeiffer Vacuum ActiveLine optionally connectable - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations ... more info

HiCube 80 Eco Compact series of pumping stations for all high vacuum applications Air-cooled and ready for operation with HiPace 80 and MVP 015 dry diaphragm backing pump DN 63 CF-F With DCU 002 90-132 V AC, 50/60 Hz ; 185-265 V AC, 50/60 Hz Pfeiffer Vacuum ActiveLine optionally connectable - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations ... more info

HiCube 80 Eco Compact series of pumping stations for all high vacuum applications Air-cooled and ready for operation with HiPace 80 and MVP 015 dry diaphragm backing pump DN 63 ISO-K With DCU 002 90-132 V AC, 50/60 Hz ; 185-265 V AC, 50/60 Hz Pfeiffer Vacuum ActiveLine optionally connectable - Analytical - Leak detection - Vacuum process technology - Research, Development and Scientific - Particle accelerators - Electron-beam welding - Solar Energy Pumping Stations ... more info

Very compact, oil-free, economical, self-contained pumping system. The Mini-TASK AG81 is a compact, portable, fully integrated turbo-pumping system mounted in a handsome housing, containing a Varian Turbo-V 81-M turbomolecular pump and a 10 l/min. diaphragm pump. Features: Compact & light weight Dry, clean system Self-contained Robust Universal voltage (90V-220V, 50/60 Hz) CE/CSA certification Optional RS-232 communication protocol Integrated control and display of Mini-IMG Gauge ... more info

Features New Generation Turbomolecular Pump Turbo-V 81-M and TV301 Navigator Compact, Light, Dry, Clean and Robust System Voltage 110V - CE/CSA certified RS-232 or Analogical Communication Large pressure data display on board Pressure driven set point Analog set point IDP-3 Dry Scroll backing pump This product can be offered with wheels Benefits Designed for demanding applications Cost-effective pumping solution Can be used world-wide Easy to use: plug and play system Complies ... more info

Features New Generation Turbomolecular Pump Turbo-V 81-M and TV301 Navigator Compact, Light, Dry, Clean and Robust System Voltage 110V - CE/CSA certified RS-232 or Analogical Communication Large pressure data display on board Pressure driven set point Analog set point IDP-3 Dry Scroll backing pump This product can be offered with wheels Benefits Designed for demanding applications Cost-effective pumping solution Can be used world-wide Easy to use: plug and play system Complies ... more info

Pfeiffer -Balzers TSH 064D  is an oil-free turbo drag high vacuum pumping system, with delayed turbo pump start. Pfeiffer TSH 064D  is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-8 Mbar with Pumping Speed of 56 l/sec. Simple one button operation. Pfeiffer-Balzers TSH 064D  high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Pfieffer-Balzers TMH-064 turbomolecular drag pump is the primary ... more info

Pfeiffer -Balzers TSH 065D  is an oil-free turbo drag high vacuum pumping system, with delayed turbo pump start. Pfeiffer TSH 065D  is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-8 Mbar with Pumping Speed of 56 l/sec. Simple one button operation. Pfeiffer-Balzers TSH 065D  high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Pfieffer-Balzers TMH-065 turbomolecular drag pump is the primary ... more info

Pfeiffer-Vacuum TSH-071 Turbo Cube is an oil-free turbomolecular drag high vacuum pumping system, with delayed turbo pump start. Pfeiffer-Vacuum TSH-071 Turbo Cube is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-8 Mbar with Pumping Speed of 60 l/sec for N2. Simple one button operation. Pfeiffer-Vacuum TSH-071 Turbo Cube high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The ... more info

Pfeiffer-Vacuum TSH-071E Economy is an oil-free turbomolecular drag high vacuum pumping system, with delayed turbo pump start. Pfeiffer-Vacuum TSH-071E Economy is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-8 Mbar with Pumping Speed of 60 l/sec for N2. Simple one button operation. Pfeiffer-Vacuum TSH-071E Economy   high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The ... more info

Varian Minuteman Turbo V-70D  Dry is an oil-free turbomolecular high vacuum pumping system. The Varian Minuteman Turbo V-70D  Dry is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-6 Mbar with Pumping speed of 65 l/sec. Simple one button operation. Varian Minuteman Turbo V-70D  Dry  high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Varian ... more info

Alcatel Drytel 100 is an oil-free turbo drag high vacuum pumping system, with delayed turbo pump start. The Drytel 100 is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-6 Mbar. Simple one button operation.  Alcatel Drytel 100 high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Alcatel MDP-5030 CP turbo drag pump is the primary high vacuum pump with DN-100-ISO inlet flange, ... more info

Alcatel Drytel 30 is an oil-free turbo drag high vacuum pumping system, with delayed turbo pump start. The Drytel 30 is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-6 Mbar. Simple one button operation. Alcatel Drytel 30 high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Alcatel MDP-5010 turbo drag pump is the primary high vacuum pump with DN-63-ISO inlet flange, Alcatel Drytel 30 system produce ... more info

Alcatel Drytel 31 is an oil-free turbo drag high vacuum pumping system. The Drytel 31 is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-6 Mbar. Simple one button operation.  Alcatel Drytel 31 high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Alcatel MDP-5011 turbo drag pump is the primary high vacuum pump with DN-63-ISO inlet flange, Alcatel Drytel 30 system produce outstanding high vacuum flow ... more info

Alcatel Packtel 5080 is an  turbomolecular  high vacuum pumping system. The Alcatel Packtel 5080is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-8 Mbar. Simple one button operation.  Alcatel Packtel 5080 high vacuum pumping system is composed of a turbo drag pump backed with small Alcatel 2002 rotary vane pump. The Alcatel 5080 turbomolecularpump is the primary high vacuum pump with DN-63CF ... more info

Edwards Pico DRY 70 Dry  is an oil-free turbo drag high vacuum pumping system. The Edwards Pico DRY 70 is a compact bench top, light weight and very quiet system that can operate from atmosphere to 5x10-6 Mbar with Pumping speed of 65 l/sec.Simple one button operation.  Edwards Pico DRY 70  high vacuum pumping system is composed of a turbo drag pump backed with diaphragm pump. The Edwards EXT-70H turbomolecular pump is the primary high vacuum pump with ... more info

TCP 350 Profibus, drive electronics The TCP 350 drive electronics unit is employed for driving and monitoring the HiPace 80, 300, 400 and 700 Complete electronics in a single unit Mating plug for "Remote" connector included in scope of delivery With integrated Profibus interface Mains requirement: voltage (range) 115 / 230 V AC, 50/60 Hz, Mains requirement: power consumption 400 VA, Turbo pump: TMH/U 071 P; TMH/U 261 P; TMH/U 521 P, Mating plug for the Remote socket is ... more info

DCU 001 Display and operating instrument for Pfeiffer Vacuum drive instruments Ensures the control of all parameters of these instruments Connecting cable DCU/TC (3 m) is included Power supply exlusively from Pfeiffer electronic drive unit (connection cable DCU 001 - TM 3000 see accessories) In connection with the HiMag 2301 an extra cable is necessarily. (Order nr. PM 051 726 -T). The modular system with minimal costs, precisely tailored to your requirements. Pfeiffer - All DCU ... more info

DCU 100 Product description: DCU 100, Display control unit incl. power supply is used for the voltage supply of the CompactTurbo molecular pumps TPD 011/ TMH/U 071 with integrated electronic drive unit TC The connecting cable "RS 485" DCU/TC (3 m) is included.

DCU 200 Product description: DCU 200, Display control unit incl. power supply is used for the voltage supply of the CompactTurbo molecular pumps TMH/U 261, TPH/U 261 with integrated electronic drive unit TC 600. The connecting cable "RS 485" DCU/TC (3 m) is included.

DCU 300 DCU 300, Display control unit incl. power supply is used for the voltage supply of the CompactTurbo molecular pumps TMH/U 261, TPH/U 521, TPH/U 521 PC with integrated electronic drive unit TC 600. The connecting cable "RS 485" DCU/TC (3 m) is included.

DCU 600 Display control unit, incl. power supply is used for the voltage supply of the CompactTurbo molecular pumps TPH/U 1201/1501/1801/2301 with integrated electronic drive unit TC 750. - The connecting cable "RS 485" DCU/TC (3 m) is included - At main voltage 90-132 V AC reduced output current (3,8 A) Mains requirement: voltage (range): 90 - 132 / 185 - 265 V AC, Mains requirement: power consumption: 900 VA, The connecting cable DCU/TC is included. At main voltage 90-132 V AC ... more info

TPS 100 Mains pack for wall/standard rail fitting is used for the voltage supply of the CompactTurbo molecular pumps TPD 011/ TMH/U 071 with integrated electronic drive unit TC 100. Mains requirement: voltage (range) 90 - 132 / 185 - 265 V AC, Mains requirement: power consumption 125 VA, The modular system with minimal costs, precisely tailored to your requirements.

TPS 200 TPS 200, mains pack for wall/standard rail fitting is used for the voltage supply of the CompactTurbo molecular pumps TMH/U 261, TPH/U 261 PC with integrated electronic drive unit Mains requirement: voltage (range) 90 - 132 / 185 - 265 V AC, Mains requirement: power consumption 230 VA VA, The modular system with minimal costs, precisely tailored to your requirements.

TPS 300 TPS 300, power supply for wall/standard rail fitting is used for the voltage supply of the CompactTurbo molecular pumps TMH/U 521, TPH/U 521 PC with integrated electronic drive unit. Mains requirement: voltage (range): 90 - 132 / 185 - 265 V AC. Mains requirement: power consumption: 350 VA The modular system with minimal costs, precisely tailored to your requirements .

TPS 600 Product description: TPS 300, power supply for wall/standard rail fitting is used for the voltage supply of the CompactTurbo molecular pumps TPH/U 1201/1501/1801/2301 with integrated electronic drive unit TC 750. At main voltage 90-132 V AC reduced output current (3,8 A) Mains requirement: voltage (range) 90 - 132 / 185 - 265 V AC Mains requirement: power consumption 900 VA At main voltage 90-132 V AC reduced output current. (3,8 A) The modular system with minimal costs, precisely ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

This Edwards EXC120 turbo pump controller Compatiblity: Edwards Turbo Pumps: EXT 70, EXT 70H, EXT 255H.

Features and Benefits Switched-mode power supplies which automatically adjust to any electrical supply. Electromagnetic compatibility which exceeds the requirements of the European generic immunity and emission standards. Regenerative power supply which provides vent-valve control options. Rear panel sockets for vent-valve, air-cooler and active vacuum gauge. Full remote control. Standby and bakeout band control from front panel. User selectable ‘normal’ speed and time-out ... more info

TIC automatically recognizes and controls one 24 V turbomolecular pump from either the DX or EXDC ranges. DX turbos have full serial communication with TIC and may be both configured and report status via TIC. Both mains and 24 V backing pumps may be controlled by TIC. For larger vacuum systems the TIC may control mains backing pumps, including XDS10 and up to RV12, via the optional relay box. The optional external relay box enables mains backing pumps to be controlled and also provides ... more info

TIC automatically recognizes and controls one 24 V turbomolecular pump from either the DX or EXDC ranges. DX turbos have full serial communication with TIC and may be both configured and report status via TIC. Both mains and 24 V backing pumps may be controlled by TIC. For larger vacuum systems the TIC may control mains backing pumps, including XDS10 and up to RV12, via the optional relay box. The optional external relay box enables mains backing pumps to be controlled and also provides ... more info

TIC automatically recognizes and controls one 24 V turbomolecular pump from either the DX or EXDC ranges. DX turbos have full serial communication with TIC and may be both configured and report status via TIC. Both mains and 24 V backing pumps may be controlled by TIC. For larger vacuum systems the TIC may control mains backing pumps, including XDS10 and up to RV12, via the optional relay box. The optional external relay box enables mains backing pumps to be controlled and also provides ... more info

TIC automatically recognizes and controls one 24 V turbomolecular pump from either the DX or EXDC ranges. DX turbos have full serial communication with TIC and may be both configured and report status via TIC. Both mains and 24 V backing pumps may be controlled by TIC. For larger vacuum systems the TIC may control mains backing pumps, including XDS10 and up to RV12, via the optional relay box. The optional external relay box enables mains backing pumps to be controlled and also provides ... more info

Pfeiffer-Vacuum DCU 100 Turbo Pump control unit including Power Supply is used for a voltage supply of the Pfeiffer Vacuum TPD 020 and TMH/TMU 071P Turbo Pumps. It ensures the control of parameters of these instruments, the connection of several pressure gauge heads is possible. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 24 V DC, Output current 4.1 A, Ambient temperature 5-40 C, weight 1.6 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

Pfeiffer-Vacuum DCU 200 Turbo Pump control unit including Power Supply is used for a voltage supply of the Pfeiffer Vacuum TMH/TMU 261P and TPH/TPU 261 PC Turbo Pumps. It ensures the control of parameters of these instruments, the connection of several pressure gauge heads is possible. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 48 V DC, Output current 4.1 A, Ambient temperature 5-40 C, weight 1.9 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

Pfeiffer-Vacuum DCU 300 Turbo Pump control unit including Power Supply is used for a voltage supply of the Pfeiffer Vacuum TMH/TMU 521P and TPH/TPU 521 PC Turbo Pumps. It ensures the control of parameters of these instruments, the connection of several pressure gauge heads is possible. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 72 V DC, Output current 4.1 A, Ambient temperature 5-40 C, weight 2.2 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

DCU 600, Display control unit, incl. power supply is used for the voltage supply of the CompactTurbo molecular pumps TPH/U 1201/1501/1801/2301 with integrated electronic drive unit TC 750.

Pfeiffer TC 600 Turbo Pump Controller

Pfeiffer Balzers TCP-015 Turbo Pump Controller. The low-priced control unit for turbo pumps TMH/TMU 062 to TMH/TMU 064, TMH/TMU 065. Controls arranged on the front panel. Standby function, this option permits the Turbo molecular pump to be operated at 66% of its rated speed. This results an extended service life of the bearings and reduction in noise and vibration. Connections for remote control. Can be used for automatic and delayed control of venting process, connections for heating and ... more info

Pfeiffer Balzers TCP-040 Turbo Pump Controller. The low-priced control unit for turbo pumps from TPH/TPU 040 to TPH/TPU 060. Controls arranged on the front panel. Standby function, this option permits the Turbo molecular pump to be operated at 66% of its rated speed. This results an extended service life of the bearings and reduction in noise and vibration. Unit is fully rebuilt and comes with FULL 12-MONTHS WARRANTY. IN STOCK !

Pfeiffer Balzers TCP-120 Turbo Pump Power Supply. Low priced power supply Control turbo pumps from TPH/TPU 060 to TPH/TPU 330.Simple plug and play operation. The electronic Power supply has been design for main voltages from 100 – 240 V 50/60Hz without changeover. Unit is fully rebuilt and comes with FULL 12-MONTHS WARRANTY. IN STOCK !

Pfeiffer Balzers TCP-121 Turbo Pump Controller. The low-priced control unit for turbo pumps from TPH/TPU 060 to TPH/TPU 330. Controls arranged on the front panel. Standby function, this option permits the Turbo molecular pump to be operated at 66% of its rated speed. This results an extended service life of the bearings and reduction in noise and vibration. Connections for remote control. Can be used for automatic and delayed control of venting process, connections for heating and cooling, ... more info

Pfeiffer Balzers TCP-300 Turbo Pump Controller. Control unit for turbo pumps from TPH/TPU 170 to TPH/TPU 510. Controls arranged on the front panel. Standby function, this option permits the Turbo molecular pump to be operated at 66% of its rated speed. This results an extended service life of the bearings and reduction in noise and vibration. Connections for remote control. Connections for heating and cooling. Unit is fully rebuilt and comes with FULL 12-MONTHS WARRANTY. IN STOCK !

Pfeiffer Balzers TCP-305 Turbo Pump Controller. Control unit for turbo pumps from TPH/TPU 170 to TPH/TPU 520. Control of the volume flow rate with a given gas throughput by speed variations. Pressure controlled via the turbo pump speed. Connections for remote control. Linear actual value recording , 0.5-10V. 460 W power output for high gas throughput and rapid readiness for operation. Short response time for turbo pump speed and pressure. Unit is fully rebuilt and comes with FULL 12-MONTHS ... more info

Pfeiffer Balzers TCP-310 Turbo Pump Controller. Control unit for turbo pumps from TPH/TPU 170 to TPH/TPU 1500. Controls arranged on the front panel. Standby function, this option permits the Turbo molecular pump to be operated at 66% of its rated speed. This results an extended service life of the bearings and reduction in noise and vibration. Connections for remote control. Connections for heating and cooling. Unit is fully rebuilt and comes with FULL 12-MONTHS WARRANTY. IN STOCK !

Pfeiffer Balzers TCP-380 Turbo Pump Controller. Control unit for turbo pumps from TPH/TPU 060 to TPH/TPU 1500. A microprocessor-controlled unit with diagnostic and monitoring functions. The microprocessor detects the turbo pump type with the aid of programming resistance and automatically associates the setpoint values for rated speed, standby and maximum speed. The TCP-380 is monitors oil flow, motor and housing temperature, turbo pump speed and motor current. Computer connection for data ... more info

Pfeiffer Balzers TCP-5000 Turbo Pump Controller. Control unit for turbo pumps from TPH/TPU 1500 to TPH/TPU 5000. Controls arranged on the front panel. Monitoring of operating hours and turbo pump speed. Standby function, this option permits the Turbo molecular pump to be operated at 66% of its rated speed. This results an extended service life of the bearings and reduction in noise and vibration. Connections for remote control. Connections for heating and cooling. Unit is fully rebuilt and ... more info

Pfeiffer Balzers TCP-600 Turbo Pump Controller. Control unit for turbo pumps from TMH/TMU 1000 to TMH/TMU 1600. A microprocessor-controlled unit with diagnostic and monitoring functions. The microprocessor detects the turbo pump type with the aid of programming resistance and automatically associates the setpoint values for rated speed, standby and maximum speed. The TCP-600 is monitors oil flow, motor and housing temperature, turbo pump speed and motor current. Computer connection for data ... more info

Pfeiffer-Vacuum TPS 100 Turbo Pump Power Supply is used for a voltage supply of the Pfeiffer Vacuum TPD 020 and TMH/TMU 071 Turbo Pumps. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 24 V DC, Output current 4.1 A, Ambient temperature 5-40 C, weight 1.2 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

Pfeiffer-Vacuum TPS 200 Turbo Pump Power Supply is used for a voltage supply of the Pfeiffer Vacuum TMH/TMU 261 and TMH/TMU 261 C Turbo Pumps. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 48 V DC, Output current 4.1 A, Ambient temperature 5-40 C, weight 1.4 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

Pfeiffer-Vacuum TPS 300 Turbo Pump Power Supply is used for a voltage supply of the Pfeiffer Vacuum TMH/TMU 521 and TMH/TMU 521 PC Turbo Pumps. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 72 V DC, Output current 4.1 A, Ambient temperature 5-40 C, weight 1.7 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

Pfeiffer-Vacuum TPS 600 Turbo Pump Power Supply is used for a voltage supply of the Pfeiffer Vacuum TMH/TMU 1001, TMH/TMU 1601, TMH 2101, TPH 1201, TPH 1501, TPH 1801, and TPH 2301Turbo Pumps. Mains requirement 90-130 / 185-265 V AC 50/60Hz. Output voltage 140 V DC, Output current 5.8 A, Ambient temperature 5-40 C, weight 2.5 Kg. Unit comes with FULL 12-MONTHS WARRANTY. IN Stock.

Input: Voltage: 20.4 to 32.2 Vdc Power: with 2 Vpp max ripple 60 W min. Output: Voltage: 42 Vac nominal ±10%, 3-phase Frequency: 1250 Hz, ±2% Power: 54 W maximum Other Operating temperaure: 0°C to + 40 °C Storage temperature: 20°C to + 70°C Weight: 0.5 Kg (1.1 Ibs)

Input: Voltage: 100, 120, 220, 240 Vac±10%, 1-phase Frequency: 50 to 60 Hz Power 600: VA maximum Output: Voltage: 56 Vac nominal ±10% Frequency: 700 Hz ±2% Power 430: W maximum water cooling: 350 W air cooling: 220 W Operating temperature: 0°C to +40 °C Storage temperature -20°C to +70°C Weight (both models) 10.7 kg (23.6 lbs)  

The Varian, Inc. Turbo-V Rack-Mount Controllers are microprocessor-controlled frequency converters with self-diagnostic and protection features that ensure the highest degree of reliability. Each compact, ¼- or ½-rack unit has a multifunction, two-line, LCD alphanumeric display, with back lighting, for pump status and error code diagnostics. It displays rotatonal speed as the pump starts up and indicates when full speed is reached. At any time during the operation of the pump, the ... more info

The Varian, Inc. Turbo-V Rack-Mount Controllers are microprocessor-controlled frequency converters with self-diagnostic and protection features that ensure the highest degree of reliability. Each compact, ¼- or ½-rack unit has a multifunction, two-line, LCD alphanumeric display, with back lighting, for pump status and error code diagnostics. It displays rotatonal speed as the pump starts up and indicates when full speed is reached. At any time during the operation of the pump, the ... more info

The Varian, Inc. Turbo-V Rack-Mount Controllers are microprocessor-controlled frequency converters with self-diagnostic and protection features that ensure the highest degree of reliability. Each compact, ¼- or ½-rack unit has a multifunction, two-line, LCD alphanumeric display, with back lighting, for pump status and error code diagnostics. It displays rotatonal speed as the pump starts up and indicates when full speed is reached. At any time during the operation of the pump, the ... more info

The model is provided with a front panel with an LCD alphanumeric display to indicate the operating conditions/parameters of the Turbo-V pump and a keyboard, and a rear panel with input/output connectors. The controller is a solid-state frequency converter which is driven by a single chip microcomputer and is composed of: Power transformer Front panel display and keyboard Rear panel with input/output connectors PCB including: power supply and 3-phase output, analog and input/output section, ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

Designed with a high level communication interface Features Automatic power supply detection from 100 to 240V 50/60Hz, single phase Menu operation Sophisticated pump monitoring Rotational speed Pump current consumption Pump and controller temperature Total running time Pump fault detection Diagnostic mode with last ten alarm codes Control of: Rotational speed venting Auto start Start delay Maintenance schedule Multiple interfaces PC/PLC controlled processes via RS 232/485 ... more info

Alcatel CFF 450T - Fully rebuild controller.

Alcatel CFF 450T - Fully rebuild controller.

Alcatel CFV 100 Controller, fully rebuild

The EXC Controller generates the electrical supply and the control signals necessary to operate an EXT pump and its accessories. The Controller has no front-panel controls and can only be operated through the logic interface. To operate the EXT pump, you must therefore connect the Controller to your own control equipment.  Alternatively, you can configure the mating-plug for the logic interface connector so that the EXT pump starts to operate as soon as the electrical supply to the ... more info

This Edwards EXC120 turbo pump controller Compatiblity: Edwards Turbo Pumps: EXT 70, EXT 70H, EXT 255H.

Features and Benefits Switched-mode power supplies which automatically adjust to any electrical supply. Electromagnetic compatibility which exceeds the requirements of the European generic immunity and emission standards. Regenerative power supply which provides vent-valve control options. Rear panel sockets for vent-valve, air-cooler and active vacuum gauge. Full remote control. Standby and bakeout band control from front panel. User selectable ‘normal’ speed and time-out ... more info

Mains voltage, with selector switch: 100/120/220/240 V,+10%/-15% Mains frequency: 50/60 Hz Power consumption including all connected units: <1000 VA Power consumption of theTURBOVAC: <400 VA Power output (motor) Nominal voltage 42 V Link circuit current limitation Acceleration (max. 10 min.) 5 A Continuous operation 3.5 A TURBOVAC speed ratings TURBOVAC 150 / 151: 50 000 min-1 TURBOVAC 360 / 361: 45 000 min-1 TURBOVAC 600: 36 000 min-1 TURBOVAC 1000: 36 000 min-1 TURBOVAC 1100: 30 ... more info

Technical data Mains voltage ranges, selectable: 90-140 V, 180-260 V Mains frequency: 50/60 Hz Rated speed of the TURBOVAC: 72,000 min-1=1200 Hz Power consumption briefly (acceleration): up to 64 VA(45 W) continuously (nominal speed): 35 VA(18 W) idle: 6 VA(3 W) Outputs Voltage 3 x 150 V Nominal frequency 1200 Hz Frequency range of the output voltage 220-1250 Hz Ambient temperatures during operation 0-40°C during storage - 40°C to + 85°C Max. rating of the relay contacts ... more info

This Leybold Heraeus TurboTronik NT 150/360 controller Compatibility: Leybold Heraeus Turbo Molecular Pumps TurboVac 150 TurboVac 360

This Leybold Heraeus TurboTronik NT 151/361 controller Compatibility: Leybold Heraeus Turbo Molecular Pumps TurboVac 151 TurboVac 361

HiPaceTM 1200 C Powerful turbopump with a pumping speed of up to 1250 l/s DN 200 CF-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 1200 C Powerful turbopump with a pumping speed of up to 1250 l/s DN 200 ISO-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 1200 C Powerful turbopump with a pumping speed of up to 1250 l/s DN 200 ISO-K flange Integrated TC 1200 drive electronics with power supply Cooling: Water cooling Integrated sealing gas system with electric sealing gas valve 24 V DC Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 1500 C Powerful turbopump with a pumping speed of up to 1450 l/s DN 250 CF-F flange Integrated TC 1200 drive electronics with power supply Cooling: Water cooling Integrated sealing gas system with electric sealing gas valve 24 V DC Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma ... more info

HiPaceTM 1500 C Powerful turbopump with a pumping speed of up to 1450 l/s DN 250 ISO-F flange Integrated TC 1200 drive electronics with power supply Cooling: Water cooling Integrated sealing gas system with electric sealing gas valve 24 V DC Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma ... more info

HiPaceTM 1500 C Powerful turbopump with a pumping speed of up to 1450 l/s DN 250 ISO-K flange Integrated TC 1200 drive electronics with power supply Cooling: Water cooling Integrated sealing gas system with electric sealing gas valve 24 V DC Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Metallurgy - Vacuum industries - Semiconductor technology - Sputtering - Plasma ... more info

HiPaceTM 1800 C Powerful turbopump with a pumping speed of up to 1450 l/s DN 200 ISO-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 1800 C Powerful turbopump with a pumping speed of up to 1450 l/s DN 200 ISO-K flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 2300 C Powerful turbopump with a pumping speed of up to 1900 l/s DN 250 CF-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 2300 C Powerful turbopump with a pumping speed of up to 1900 l/s DN 250 ISO-F flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

HiPaceTM 2300 C Powerful turbopump with a pumping speed of up to 1900 l/s DN 250 ISO-K flange Integrated TC 1200 drive electronics with power supply Integrated sealing gas system with electric sealing gas valve 24 V DC Cooling: Water cooling Corrosive gas version Protection Class IP 54 Interfaces: RS-485, Remote, (Profibus/DeviceNet on request) Extensive accessories expand the range of applications - Process technology - Metallurgy - Vacuum industries - Semiconductor technology - ... more info

Varian V-1000ICE with DN200 ISO Inlet Flange, KF-40 Outlet Flange. Pumping speed: for 1000 l/sec for N2, Ultimate pressure with rotary vane pump < 5x10-9 Mbar, Recommended Backing Pump 10-20 m3/h Air or Water Cooling available.

The Varian, Inc. IDP-3 Dry Scroll Pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is the smallest scroll pump made for general vacuum applications, which makes it easy to integrate it into OEM systems, and it weighs only 21 pounds (9.5 kg). Yet with a pumping speed of 60 liters/min. and a very low base pressure of 250 millitorr, it is the highest-performing dry pump in its class. Features: Oil-free, for no ... more info

The Varian SH-110 is a dry, hermetic scroll pump that provides industry-leading fetures designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump produces a pumping speed of 110 L/m (on 60 Hz power) and achieves an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is also ideally suited to end-user applications. The SH-110 pump conforms with CE, CSA, and Semi S2-0200 requirements. Features Low-temperature operation ... more info

The Varian, Inc. TriScroll™ Dry Primary Pumps are multi-stage, oil-free vacuum pumps, designed and manufactured by Varian, Inc. for high reliability. The TriScroll pumps deliver clean vacuum at high speed and low ultimate pressure. The unique, patented features of the TriScroll pumps provide proven reliability and durability, leading to low cost of ownership and consistent performance. The unique TriScroll design delivers high pumping speed and achieves low ultimate pressure within a ... more info

The Varian, Inc. TriScroll™ Dry Primary Pumps are multi-stage, oil-free vacuum pumps, designed and manufactured by Varian, Inc. for high reliability. The TriScroll pumps deliver clean vacuum at high speed and low ultimate pressure. The unique, patented features of the TriScroll pumps provide proven reliability and durability, leading to low cost of ownership and consistent performance. The unique TriScroll design delivers high pumping speed and achieves low ultimate pressure within a ... more info

Advantages to the User Maintenance-poor, free of oil and bearing lubrication, free of hydrocarbons Absolutely oil-free High effective pumping speed Low ultimate pressure Low noise level Low vibration operation Atmospheric inlet pressure allowable Low weight Air cooling Low power consumption Typical Applications Electron beam welding Lasers Leak detection systems Accelerators / synchrontrons Surface analysis instruments Scanning electron microscopes Load lock Spectroscopy Lamp ... more info

Advantages to the User Maintenance-poor, free of oil and bearing lubrication, free of hydrocarbons Absolutely oil-free High effective pumping speed Low ultimate pressure Low noise level Low vibration operation Atmospheric inlet pressure allowable Low weight Air cooling Low power consumption Typical Applications Electron beam welding Lasers Leak detection systems Accelerators / synchrontrons Surface analysis instruments Scanning electron microscopes Load lock Spectroscopy Lamp ... more info

Advantages to the User Maintenance-poor, free of oil and bearing lubrication, free of hydrocarbons Absolutely oil-free High effective pumping speed Low ultimate pressure Low noise level Low vibration operation Atmospheric inlet pressure allowable Low weight Air cooling Low power consumption Typical Applications Electron beam welding Lasers Leak detection systems Accelerators / synchrontrons Surface analysis instruments Scanning electron microscopes Load lock Spectroscopy Lamp ... more info

The XDS pumps are an innovative design which use a bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS pumps are designed for pumping condensable vapors and use materials selected for a wide range of ... more info

The XDS pumps are an innovative design which use a bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS pumps are designed for pumping condensable vapors and use materials selected for a wide range of ... more info

The XDS pumps are an innovative design which use a bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS pumps are designed for pumping condensable vapors and use materials selected for a wide range of ... more info

The Varian, Inc. TriScroll™ Dry Primary Pumps are multi-stage, oil-free vacuum pumps, designed and manufactured by Varian, Inc. for high reliability. The TriScroll pumps deliver clean vacuum at high speed and low ultimate pressure. The unique, patented features of the TriScroll pumps provide proven reliability and durability, leading to low cost of ownership and consistent performance. The unique TriScroll design delivers high pumping speed and achieves low ultimate pressure within a ... more info

The Varian, Inc. TriScroll™ Dry Primary Pumps are multi-stage, oil-free vacuum pumps, designed and manufactured by Varian, Inc. for high reliability. The TriScroll pumps deliver clean vacuum at high speed and low ultimate pressure. The unique, patented features of the TriScroll pumps provide proven reliability and durability, leading to low cost of ownership and consistent performance. The unique TriScroll design delivers high pumping speed and achieves low ultimate pressure within a ... more info

SH-100 Hermetic Single Scroll Pumpsare designed to provide reliable, dry vacuum in a small, economical packa- ge. The pump is ideally suited for many applications including Analytical Instruments and Research and Development. This simple, reliable design utilizes proven TriScroll™ seal technology for longer demonstrated maintenance intervals. The SH-100 conforms with CE, UL/CUL, and Semi S2-0200 requirements.

ESDP 12 An excellent alternative to small oil-sealed rotary vane pumps. Ideal for applications where any possible contamination of the vacuum system by pump oil cannot be tolerated, Offers high performance, Easy to install - only electrical power is required, Compact and light, Little routine maintenance - no oil changes,no filter or foreline trap replacement,and no oil waste disposal

ESDP 30 An excellent alternative to small oil-sealed rotary vane pumps. Ideal for applications where any possible contamination of the vacuum system by pump oil cannot be tolerated, Offers high performance, Easy to install - only electrical power is required, Compact and light, Little routine maintenance - no oil changes,no filter or foreline trap replacement,and no oil waste disposal

GVSP30 The right combination of size, performance, and low cost to replace more expensive dry pumps currently used in clean applications that demand oil-free pumping. Ideal for chamber roughing, Ideal backing pump for mag-lev bearing turbomolecular or roots, pumps used in a wide range of clean R & D applications, Features a gas ballast and a well-positioned outlet port that allows any condensate to drain from the pump

The XDS pumps are an innovative design which use a bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS pumps are designed for pumping condensable vapors and use materials selected for a wide range of ... more info

The XDS pumps are an innovative design which use a bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS pumps are designed for pumping condensable vapors and use materials selected for a wide range of ... more info

The XDS pumps are an innovative design which use a bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors. Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps. The XDS pumps are designed for pumping condensable vapors and use materials selected for a wide range of ... more info

The MD 12 diaphragm pump is an especially powerful pump for oil-free evacuation and pumping of non aggressive gases. The three-stage construction of the eight-head pump provides the advantageous combination of very high pumping speed and very low ultimate vacuum. The flowpath consists of aluminum, stainless steel and carefully selected plastics (diaphragms and valves made of FPM) to permit a wide range of applications. The fabric-reinforced double diaphragms are made of highly flexible FPM for ... more info

These three-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of non-corrosive gases. They reach an excellent ultimate vacuum of 1.5 mbar. All parts in contact with pumped gases and vapors are made of aluminum, stainless steel and carefully selected plastics suitable for a wide range of applications with non-corrosive gases. The new NT-series provides whisper quiet and ultra-low-vibration operation, high leak tightness and improved performance. The highly flexible ... more info

These three-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of non-corrosive gases. They reach an excellent ultimate vacuum of 1 mbar. All parts in contact with pumped gases and vapors are made of aluminum, stainless steel and carefully selected plastics suitable for a wide range of applications with non-corrosive gases. The new NT-series provides whisper quiet and ultra-low-vibration operation, high leak tightness and improved performance. The highly flexible ... more info

The MD 1 diaphragm pump is an excellent choice for oil-free evacuation and pumping of non-corrosive gases down to 1.5 mbar ultimate vacuum. The three-stage design with precisely guided flat diaphragms provides outstanding pumping speed even close to the ultimate vacuum, especially when compared with similarly rated two-stage diaphragm pumps. The MD 1 is an ultra-low-vibration pump, with very long diaphragm lilfetimes documented with years of testing. With a flow path consisting of aluminum and ... more info

VACUUBRAND four-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of gases requiring very low vacuum and high flow rates. All parts in contact with pumped vapors or gases are made of aluminum, stainless steel and carefully selected plastics compatible with a wide range of applications with non-corrosive gases. The four-stage, "double-star" design provides the advantageous combination of high pumping speed and an outstanding ultimate vacuum down to 0.6 ... more info

VACUUBRAND four-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of gases requiring very low vacuum and high flow rates. All parts in contact with pumped vapors or gases are made of aluminum, stainless steel and carefully selected plastics compatible with a wide range of applications with non-corrosive gases. The four-stage, "double-star" design provides the advantageous combination of high pumping speed and an outstanding ultimate vacuum down to 0.3 ... more info

MV 2 NT Four-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of gases when the need is to reach fractional millibar ultimate vacuums. All parts in contact with pumped vapors or gases are made of aluminum, stainless steel and carefully selected plastics suitable for a wide range of non-corrosive applications. The new NT-series pumps provide whisper-quiet and ultra-low-vibration operation, high leak-tightness and improved vacuum. The highly flexible, ... more info

MV 2 NT VARIO Four-stage diaphragm pumps are an excellent solution for continuous, oil-free pumping of gases when the need is to reach fractional millibar ultimate vacuums. All parts in contact with pumped vapors or gases are made of aluminum, stainless steel and carefully selected plastics suitable for a wide range of non-corrosive applications. The new NT-series pumps provide whisper-quiet and ultra-low-vibration operation, high leak-tightness and improved vacuum. The highly flexible, ... more info

Diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts in contact with pumped media are made of aluminum and selected plastics and allow a wide range of applications for non corrosive gases. The two-stage construction provides the advantageous combination of high pumping speed and an ultimate vacuum down to 7 mbar. The highly flexible fabric-reinforced double diaphragm made of FPM is ideal for extended operating life. The new NT-series ... more info

Diaphragm pumps are an excellent solution for continuous, oil-free evacuation and pumping of gases. All parts in these MZ 2 series pumps that are in contact with pumped media are made of aluminum, stainless steel and selected plastics, allowing a wide range of applications for non-corrosive gases. The two-stage construction provides the advantageous combination of high pumping speed and an ultimate vacuum down to 4 mbar. The highly flexible fabric-reinforced double diaphragm made of FPM is ... more info

Extremely small but high-performance diaphragm pump with a pumping speed of 6 l/min Due to compact measures and little weight it is ideally suited for integration in analysis systems and turbo pumping stations Lower costs due to long service life of diaphragms and valves Suitable for worldwide and flexible applications thanks to direct voltage Substantial accessories expand the field of applications For all applications where a dry and oil-free vacuum is required

High-performance diaphragm pump with a pumping speed of 15 l/min For mains voltage: 120 V (+ 5 % / - 10 %) 60 Hz Ideal for applications where a dry and oil-free vacuum is required The excellent ultimate pressure offers an ideal combination with Pfeiffer Vacuum turbopumps

High-performance diaphragm pump with a pumping speed of up to 20 l/min For mains voltage: 100-120 V, 50 Hz respectively 200-230 V, 60 Hz Ideal for applications where a dry and oil-free vacuum is required

Robust and high-performance diaphragm pump with a pumping speed of up to 40 l/min For mains voltage: 100-120 V, 50 Hz, respectively 200-240 V, 60 Hz Integrated gas ballast valve allows few amounts of humidity Ideal for applications where a dry and oil-free vacuum is required

Robust and high-performance diaphragm pump with a pumping speed of up to 40 l/min For mains voltage: 90-126 / 180-254 V, 50/60 Hz Integrated gas ballast valve allows few amounts of humidity Ideal for applications where a dry and oil-free vacuum is required

High-performance diaphragm pump with a pumping speed of 200 l/min For mains voltage: 120 V (+ 5 % / -10 %), 60 Hz Ideal for applications where a dry and oil-free vacuum is required

T1000L is an ultra compact new generation dry vacuum pump jointly developed by Toyota Industries Corp. and Applied Materials, Inc., which is designed for installation on semiconductor equipment in cleanroom Features Size(L*W*H) :590*280*300mm Ultimate Pressure Pa(Torr) :1.1 (0.008) Peak Pumping Speed m3/h :100 Power Consumption kW :1.5 Sound Level dB(A): 55 Vibration G:0.1 Weight kg:104

T100L is an ultra compact new generation dry vacuum pump jointly developed by Toyota Industries Corp. and Applied Materials, Inc., which is designed for installation on semiconductor equipment in cleanroom Features Size(L*W*H) :590*280*300mm Ultimate Pressure Pa(Torr) :1.1 (0.008) Peak Pumping Speed m3/h :100 Power Consumption kW :1.5 Sound Level dB(A): 55 Vibration G:0.1 Weight kg:104

High reliability to process • Wide interstage channels are able to accommodate large quantities of powder and particles. • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet. • Vertical pumping on each stage which prevents particulate accumulation in the swept volume. Semiconductor fab rules compliant • Compact: the series 2 model is only 390 mm wide. • Clean: Alcatel ... more info

High reliability to process • Wide interstage channels are able to accommodate large quantities of powder and particles. • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet. • Vertical pumping on each stage which prevents particulate accumulation in the swept volume. Semiconductor fab rules compliant • Compact: the series 2 model is only 390 mm wide. • Clean: Alcatel ... more info

The DRYSTAR GV80 dry pump is available as a stand alone unit or in combination with an EH500A hydrokinetic drive mechanical booster for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required. The scope of supply includes as standard a in-line pressure regulator, gauge for facilitating the shaft seal purge, and a cleanable and drainable stainless steel exhaust silencer. An atmospheric seal purge kit is available for applications and pumping ... more info

Lower Utilities Costs Typically a 40% saving can be made on utilities costs over an entire fab.   Based on a 300mm fab in the US, containing 200 tools, 537 pumps 70% iGX pumps, 30% iH pumps iGX fitted with constant flow water valve Designed for Energy Efficiency High performance motors and inverter drives Low operating power consumption Lower power standby mode using Active Utility Control (AUC) Nitrogen dilution can be tuned to the application requirement ... more info

The iL is specifically designed for clean processes to give very low cost of ownership and exceptional reliability, requiring zero periodic maintenance between rebuilds. With their quite operation, small footprint and high pump speeds, they are ideally suited to loadlock, transfer chamber, PVD , SEM and similar duties.   Features and Benefits:   Low cost of ownership with no nitrogen (iL), low power and low consumption of cooling water Compact, efficient design with small ... more info

Edwards-IPX-100 Pumping speed 59 cfm, Ultimate pressure < 5 - 10 - 3 mbar. Inlet connection NW 40, Outlet connection NW25 IPX 100 is an innovative concept in next generation pumping. Integrated onto process tool platforms it has established a proven Track record for extremely high performance and reliability.  

Pumping speed 41 cfm, Ultimate pressure <3-10-2, Inlet flange ISO 63, The L70 is a low cost dry pump specifically designed for clean load-locks and similar applications.  

High reliability to process • Wide interstage channels are able to accommodate large quantities of powder and particles. • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet. • Vertical pumping on each stage which prevents particulate accumulation in the swept volume. Semiconductor fab rules compliant • Compact: the series 2 model is only 390 mm wide. • Clean: Alcatel ... more info

High reliability to process • Wide interstage channels are able to accommodate large quantities of powder and particles. • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet. • Vertical pumping on each stage which prevents particulate accumulation in the swept volume. Semiconductor fab rules compliant • Compact: the series 2 model is only 390 mm wide. • Clean: Alcatel ... more info

High reliability to process • Wide interstage channels are able to accommodate large quantities of powder and particles. • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet. • Vertical pumping on each stage which prevents particulate accumulation in the swept volume. Semiconductor fab rules compliant • Compact: the series 2 model is only 390 mm wide. • Clean: Alcatel ... more info

Pumping speed 47 cfm , Ultimate pressure < 4.00-10-2, Inlet flange DN40. Pump recommended for process like Load Lock, Transfer Chamber, PVD, Sputtering.

The DRYVAC 25P, 50P and 100 P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes.

The DRYVAC 25P, 50P and 100 P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes.

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.    The iH600 system has an HCDP80 dry pump, with an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump. Both the HCDP and HCMB pumps have enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments ... more info

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.   The iH80 system has an HCDP80 dry pump; The HCDP pump has enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.   The iH system has a gas system which introduces ... more info

The iQ Drypumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give ... more info

Edwards QDP-40 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.

Edwards QDP-80 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.

HLT 560 Rugged, dependable helium leak detector For a mains voltage of 120 V, 60 Hz With 5 m3/h rotary vane pump Very easy operation to achieve precise measuring results Analog and digital inputs and outputs for industrial use Durable and industry-tested mass spectrometer Integrated test leak Bypass option for large test items For sniffer and vacuum leak detection Simple maintenance - low cost of ownership Smallest detectable leak rate for 4He 5·10-12 mbar l/s Sniffer ... more info

HLT 565 Rugged, dependable helium leak detector For a mains voltage of 100-120 V, 50/60 Hz With cart and 30 m3/h rotary vane pump Very easy operation to achieve precise measuring results Analog and digital inputs and outputs for industrial use Durable and industry-tested mass spectrometer Integrated test leak Bypass option for large test items For sniffer and vacuum leak detection Simple maintenance - low cost of ownership   Smallest detectable leak rate for 4He ... more info

HLT 570 Rugged, dependable helium leak detector, absolutely oil-free For a mains voltage of 120 V, 60 Hz With 2 m3/h diaphragm pump Very easy operation to achieve precise measuring results Analog and digital inputs and outputs for industrial use Durable and industry-tested mass spectrometer Integrated test leak Bypass option for large test items For sniffer and vacuum leak detection Simple maintenance - low cost of ownership Smallest detectable leak rate for 4He 5·10-12 ... more info

HLT 575 Rugged, dependable helium leak detector, absolutely oil-free For a mains voltage of 100-120 V, 50/60 Hz With cart and 28 m3/h dry pump Very easy operation to achieve precise measuring results Analog and digital inputs and outputs for industrial use Durable and industry-tested mass spectrometer Integrated test leak Bypass option for large test items For sniffer and vacuum leak detection Simple maintenance - low cost of ownership   Smallest detectable leak rate for ... more info

VS Series Automatic Portable Leak Detectors Technical Specifications Model names and types of primary pump     PR02 (portable) DS-42 intrnl. rotary-vane pump     MR15 (mobile) DS-302 rotary-vane pump     MD30 (mobile) TS-620 dry scroll pump     BR15 (bench-mounted) DS-302 rotary-vane pump     BD30 (bench-mounted) TS-620 dry scroll pump Minimum detectable leak at 1000 ppm ambient helium     atm-cc/sec helium 5 × 10-12     mbar-liters/sec helium 5 × 10-12 ... more info

VS Series Automatic Portable Leak Detectors Technical Specifications Model names and types of primary pump     PR02 (portable) DS-42 intrnl. rotary-vane pump     MR15 (mobile) DS-302 rotary-vane pump     MD30 (mobile) TS-620 dry scroll pump     BR15 (bench-mounted) DS-302 rotary-vane pump     BD30 (bench-mounted) TS-620 dry scroll pump Minimum detectable leak at 1000 ppm ambient helium     atm-cc/sec helium 5 × 10-12     mbar-liters/sec helium 5 × 10-12 ... more info

VS Series Automatic Portable Leak Detectors Technical Specifications Model names and types of primary pump     PR02 (portable) DS-42 intrnl. rotary-vane pump     MR15 (mobile) DS-302 rotary-vane pump     MD30 (mobile) TS-620 dry scroll pump     BR15 (bench-mounted) DS-302 rotary-vane pump     BD30 (bench-mounted) TS-620 dry scroll pump Minimum detectable leak at 1000 ppm ambient helium     atm-cc/sec helium 5 × 10-12     mbar-liters/sec helium 5 × 10-12 ... more info

VS Series Automatic Portable Leak Detectors Technical Specifications Model names and types of primary pump     PR02 (portable) DS-42 intrnl. rotary-vane pump     MR15 (mobile) DS-302 rotary-vane pump     MD30 (mobile) TS-620 dry scroll pump     BR15 (bench-mounted) DS-302 rotary-vane pump     BD30 (bench-mounted) TS-620 dry scroll pump Minimum detectable leak at 1000 ppm ambient helium     atm-cc/sec helium 5 × 10-12     mbar-liters/sec helium 5 × 10-12 ... more info

VS Series Automatic Portable Leak Detectors Technical Specifications Model names and types of primary pump     PR02 (portable) DS-42 intrnl. rotary-vane pump     MR15 (mobile) DS-302 rotary-vane pump     MD30 (mobile) TS-620 dry scroll pump     BR15 (bench-mounted) DS-302 rotary-vane pump     BD30 (bench-mounted) TS-620 dry scroll pump Minimum detectable leak at 1000 ppm ambient helium     atm-cc/sec helium 5 × 10-12     mbar-liters/sec helium 5 × 10-12 ... more info

Based on the well-proven technology of the PhoeniXL 300 Dry, but equipped with an oil-free pump system, the PhoeniXL 300 Dry meets the highest require-ments concerning cleanness while at the same time being small in size. Advantages to the User Oil-free “dry” pump system Small footprint Quick start-up Extremely fast response Typical Applications Leak tests with stringent requirements concerning cleanness, for example Semiconductor industry, after repairs or maintenance work ... more info

The PhoeniXL 300 is a portable multi-purpose helium leak detector and equally well suited to both service and series production testing. Its rugged design and its ease of use make the PhoeniXL 300 to the best selling leak detector in the world. In connection with the sniffer lines which are available as accessories the PhoeniXL 300 may also be used as a sniffer leak detector. In connection with a partial flow pump set the PhoeniXL 300 may also be used for the detection of leaks on large ... more info

Advantages to the User This combination represents a powerful leak detector, the pumping speed of which is adapted to the particular application in each case. Cost-effective leak detector Pumping speed optimized for the particular application Fast response Quick recovery High sensitivity Fast leak rate readout also at low leak rates Typical Applications All applications involving short cycles and/or larg-er volumes and which require a mobile system, like for example: Automotive industry ... more info

Speed, Sensitivity and Reliability for Demanding Leak Detection Applications The INFICON UL1000 Mobile Helium Leak Detector is designed to meet the most demanding industrial leak detection applications. Providing fast, accurate and repeatable test results, testing flexibility, and high sensitivity in a low maintenance design, the UL1000 is ready to tackle the toughest leak detection jobs industry can offer. The UL1000 is optimized to provide quick, accurate results in any application from the ... more info

The INFICON UL5000 Helium Leak Detector is designed to meet the most critical and demanding leak detection applications. Featuring INFICON proprietary software algorithms I-CAL and Hydro-S in a field-proven vacuum design, the UL5000 provides testing flexibility, high sensitivity and quick accurate results making any leak detection application fast and easy. The UL5000 delivers fast response times in all measurement ranges and extremely short cycle times in reaching test conditions and final ... more info