The Varian, Inc. Turbo-V 3K-T turbomolecular pump is a versatile, high-performance 2000 l/s system that is designed for scientific and research applications as well as industrial production environments.

The Turbo-V 3K-T is a complete vacuum pumping system in one compact package, with innovative features such as control circuitry on board and intelligent MoniTorr technology. Varian, Inc. is the only manufacturer that offers turbo pumps with fully integrated electronics in combination with a maintenance-free dry lubricaton system.

The optimized design of the turbine guarantees high performance, even in applications with high gas loads or high levels of light gases, as well as UHV applications demanding high compression.

The sophisticated integrated electronics permit these special features:

• T-plus software interface to a computer
• PROFIBUS® communication interface
• Automatic temperature control
• Stop-speed reading function for monitoring slow-down after a stop command
• MoniTorr remote diagnostics
• Available integrated purge/vent device

  The Varian, Inc. Turbo-V 3K-T Pump has these specifications:

• Pumping speed (without inlet screen)
    - 2050 l/s (N₂), 1900 l/s (Ar), 2400 l/s (He), 2300 l/s (H₂)
• Compression ratio
    - >10⁸ (N₂), >10⁹ (Ar), 1.2 × 10⁵ (He), 1.5 × 10⁴ (H₂)
• Base pressure: <1 × 10^-9 mbar
• Inlet flange: ISO 250F or 12-in. ConFlat®
• Foreline flange: NW 40 KF
• Start-up time: <9 minutes with no gas load
• Recommended forepump: ≥30 m³/h
• Mounting orientation: Any
• Operating ambient temperature: +5 to +40 °C
• Vibration level (displacement): <0.01 µm at inlet flange
• Cooling water requirements:
    - Minimum flow: >150 l/h
    - Temperature: +15 to +35 °C
• Noise level: <45 dB (A) at 1 meter
• Power supply:
    - Voltage: 100 to 240 V AC
    - Frequency: 50 to 60 Hz
    - Max input power: 850 VA
•  

• Weight: 55 kg (121 lb)

• Pump with integrated controller unit, temperature monitoring system, and cooling water connections
• Inlet screen
• Instruction manual on CD-ROM
• 15-pin mating connector for “Remote I/O” connection
• 9-pin mating connector for “Serial” connection
• Retaining bracket for the power cable

  The choices to be made in order to choose the correct part number are:

• Type of inlet flange: ISO 250 F or 12-in. ConFlat® Flange (CFF)
• Optional purge/vent device: recommended for all industrial processes and semiconductor-related applications. Clean applications may not require it.
• Communication interface: standard RS-232/RS-485 interface or optional integrated PROFIBUS card