The Turbo-V 2K-G System

• The first application -specific pumping solution for thin-film deposition equipment
• The highest-performing, most compact unit available
• The first fully integrated approach for maximum system productivity and uptime
• The integrated package the turbomolecular pump, drive electronics, power supply, MoniTorr, purge gas fittings, and electronic communication
• The versatile electronics interface with easy-to-use software
• Analog I/O signals and RS-232/RS-485 interfaces are standard
• Varian Profibus® interface is optional.

Pumping speed for nitrogen: 1600 l/s

Compression ratio for nitrogen: 3 × 10⁵

Base pressure with recommended forepump: <1 × 10^-8 mbar

Inlet flange: ISO 250 F

Foreline flange: NW40 KF

Nominal rotational speed: 33,000 rpm

Start-up time: <7 minutes

Recommended forepump: >40 m³/h

Operating position: Any

Power supply: 100-240 V, 50-60 Hz